Window-assisted nanosphere lithography for vacuum micro-nano-electronics

Fabricating ordered 2-D nano-structured arrays using nanosphere lithography

Recent advances in the use of plasmonic metamaterials to improve absorption of light in thin-film solar photovoltaic devices has created a demand for a scalable method of patterning large areas with metal nanostructures deposited in an ordered array. This article describes two methods of fabricating ordered 2D nanosphere colloidal films: spin coating and interface coating. The two methods are c...

Micro- and Nano-Electronics Group

Nanosphere Lithography for Nitride Semiconductors

Periodic Nanowell Array using Template-Assisted Nanosphere Lithography

Nanosphere lithography (NSL) has been studied as the effective method of fabricating nano-scale array. This paper presents template-assisted NSL to obtain high-quality crystal in regularity and coverage. A periodic array of 100 nm deep nano trenches with two different widths, 400 and 450 nm was fabricated by nano imprint lithography (NIL), and used as the template. When polystyrene nanospheres ...

Vacuum-Assisted Microfluidic Lithography of Ceramic Microstructures

The method to fabricate complex shaped micro-patterned ceramic structures has been developed. Vacuum-assisted infiltrating the suspensions to the micro channels generated by the contact of polydimethylsiloxane mold to the substrate enables simple micro patterning of ceramics with complex structures in a relatively large area in short time. The use of well-dispersed ethanol-based suspensions of ...